Handbook of Charged Particle Optics

Guides the reader to understanding, designing, and using high resolution instrumentation, such as transmission electron microscopes (TEM's), scanning electron microscopes (SEMs), scanning transmission electron microscopes (STEMs), and focused ion beam systems (FIB). Covering all the most important topics in this growing area, chapters discuss instrumentation, liquid metal ion sources, Schottky cathodes, abberation theory, computer methods, resolution theory, and space charge—-balancing theory and application throughout the text.