Cover of MEMS and NEMS: Systems, Devices, and Structures

MEMS and NEMS: Systems, Devices, and Structures

Sergio E. Lyshevski

(2001) 442 pages

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.

MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Features:: Advances the theories and frontiers of micro- and nanoelectromechanics

; Offers comprehensive coverage of the synergy of fundamental, applied, and experimental research

; Focuses on the basic foundations needed to develop high-performance NEMS and MEMS

; Provides methods to attain high-fidelity modeling and analysis of NEMS and MEMS

; Introduces and illustrates the synthesis and structural classifier concept

; Reports on microfabrication technologies, techniques, processes, and materials

; Enhances the theory of nanoelectromechanics as the integration of conventional quantum theory and electromechanics


Overview and Introduction; New Trends in Engineering and Science

Micro- and Nanoscale Systems; Introduction to Design of MEMS and NEMS; Biological and Biosystems Analogies; Overview of Nano- and Microelectromechanical Systems; Applications of Micro- and Nanoelectromechanical Systems; Micro- and Nanoelectromechanical Systems; Synergetic Paradigms in MEMS; MEMS and NEMS Architecture; Fundamentals of MEMS Fabrication; Introduction and Description of Basic Processes; Microfabrication and Micromachining of ICs, Microstructures, and Microdevices; Devising and Synthesis of MEMS AND NEMS; MEMS Motion Microdevices Classifier and Synthesis; Nanoelectromechanical Systems; Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures; Introduction to Modeling, Analysis, and Simulation; Electromagnetics and its Application for MEMS and NEMS; Induction Micromachines; Synchronous Microtransducers

; Microscale Permanent-Magnet Stepper Micromotors

; Piezotransducers

; Fundamentals of Modeling of Electromagnetic Radiating Energy Microdevices

; Classical Mechanics and its Application

; Thermoanalysis and Heat Equation

; Nanosystems, Quantum Mechanics, and Mathematical Models

; Atomic Structures and Quantum Mechanics

; Molecular and Nanostructure Dynamics

; Molecular Wires and Molecular Circuits

; Control of Microelectromechanical Systems

; Introduction to Microelectromechanical Systems Control

; Lyapunov Stability Theory

; Control of Microelectromechanical Systems

; Intelligent Control of MEMS

; Hamilton-Jacobi Theory and Quantum Mechanics

Case Studies

Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS


Design and Fabrication

Analysis of Translational Microtransducers

Single-Phase Reluctance Micromotors

Modeling, Analysis, and Control

Three-Phase Synchronous Reluctance Micromotors


Magnetization Dynamics of Thin Films

Microstructures and Microtransducers With Permanent Magnets

Micromirror Actuators

Reluctance Electromagnetic Micromotors

Micromachined Polycrystalline Silicon Carbide Micromotors

Axial Electromagnetic Micromotors

Synergetic Computer-Aided Design of MEMS


Each chapter also includes a References section.