Micromachining of Engineering Materials

Joseph McGeough, ed., Univ. of Edingburgh, Scotland

2001

416 pages

Includes full-chapter bibliographies and a useful appendix that describes superfinishing techniques!

This book considers materials shaping processes used to produce engineering components of small geometry and high accuracy, focusing on conventional methods such as microgrinding and diamond turning and new techniques ranging from ultrasonics to high-resolution lithography.

Contains the latest data on material removal rates, surface accuracy, and polishing! Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining of Engineering Materials

Presenting applications for the microelectronics, computer, medical, and aerospace industries, Micromachining of Engineering Materials is a must-have reference for materials, manufacturing, mechanical, industrial, production, and design engineers; machining technologists; ceramists; tribologists; and upper-level undergraduate, graduate, and continuing-education students in these disciplines.

Contents

Introduction, H. El-Hofy, A. B. M. Khairy, T. Masuzawa, and Joseph McGeough
Measurement Techniques in Micromachining, Mohammad A. Younes
Molecular Dynamics Simulation of the Atomic Processes in Microcutting, Shoichi Shimada
Abrasive Micromachining and Microgrinding, Kai Chang
Diamond Micromachining, John Corbett
Ultrasonic Micromachining, D. Kremer and Y. Benkirane
Microelectrodischarge Machining, David M. Allen
Laser Micromachining, J. Meijer
Micromachining by Electrochemical Dissolution, Madhav Datta
Ion Beam Machining, Joseph McGeough
Electron Beam Machining, Joseph McGeough
High-Resolution Lithography, S. Thoms and D. Macintyre
Appendix: Micromachining by Finishing Techniques, Joseph McGeough
Index