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Radio-Frequency Capacitive Discharges

Yuri P Raizer, Russian Academy of Science, Moscow, Russia, Mikhail N. Schneider, Russian Academy of Science, Moscow, Russia, and Nikolai A. Yatsenko

1995

304 pages

The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings.

Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.

Contents
Basic Principals of the RF Capacitive Discharge
Excitation of an RF Discharge
Electron Motion in an Oscillating Electric Field
Electrodynamic Plasma Characteristics and Interaction with Oscillating Field
Electron Production and Loss: Plasma Maintenance
A Simplified Model of the RF Discharge
Constant Positive Plasma Potential
Stochastic Heating of Electrons
RF Discharge Modes
Moderate-Pressure RF Discharge
Space Charge Sheaths
Experimental Current-Voltage Characteristics
CVC and Normal Current Densities in the a-Discharge (Theory and Numerical Simulation)
The a-g Transition Parameters
The y-Discharge
The a-g Transition at Moderate and Low Pressures
Coexistence of Two RF Modes in the Gap
High-Pressure RF Capacitive Discharges
RF Discharge with Coated Electrodes
Low-Pressure RF Discharges and Asymmetry Effects
Self-Bias in an Asymmetric Capacitively Coupled Discharge
Correlations Between Plasma and Sheath Parameters in an Ambipolar Diffusion-Controlled Discharge
Sheath Dynamics and Current Anharmonicity in an Asymmetric Discharge
Current Anharmonicity in Asymmetric and Symmetric Discharges
Battery Effect in an Asymmetric Discharge
Plasma 'Nontransparency' and Fast Electron Response to RF Field and 'Oscillationless' Sheath Ions
The Floating Potential
The a-Sheath
The Energy Spectrum of Ions Bombarding the Electrode Surface
RF Discharge in Electronegative Gases
Smooth a-g Transition and the g Mode
Some Aspects of Stochastic Heating of Electrons
Numerical Simulation of Low-Pressure RF Discharges
Magnetron RF Discharge
Experimental Methods and Measurements
Voltage Measurements and Current-Voltage Characteristics
Probe Measurement of Constant Space and Plasma Potentials
Active DC Probing of an RF Discharge
A Method for Studying the Transverse Discharge Structure
Optical Methods for the Study of Spatial Discharge Structure
Laser-Induced Fluorescence and Laser-Optogalvanic Spectroscopy
Excitation and Control of an RF Discharge
Application of RF Capacitive Discharges for Gas Laser Excitation and Plasma Technology
RF Discharge and Gas Lasers: A Brief History
Arguments in Favor of RF Laser Excitation
Frequency Dependence of Discharge and Active Laser Medium Parameters
Selection of Designs and Parameters of Transverse RF-Excited CO2 Lasers with Diffusional Cooling
Optical Resonators of Waveguide and Slab RF CO2 Lasers
High Flowrate CO2 Lasers Excited by RF and Combined RF-DC Discharges
Lasers with Alternative Active Media
Magnetic Stabilization of Slab Discharges
Plasmachemical Technology
References
Index