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book cover

The MEMS Handbook

Mohamed Gad-el-Hak,ed.

2001

928 pages

Contents


Part I: Background and Fundamentals
Introduction, Mohamed Gad-el-Hak, University of Notre Dame
Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation
Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University
Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame
Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University
Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University
Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University
Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University
Lubrication in MEMS, Kenneth S. Breuer, Brown University
Physics of Thin Liquid Films, Alexander Oron, Technion, Israel
Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame
Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame
Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego
Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame

Part II: Design and Fabrication
Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University
MEMS Fabrication, Marc J. Madou, Nanogen, Inc.
LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc.
X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories
Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation
Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center
Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc.
Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center


Part III: Applications of MEMS
Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc.
Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison
Sensors and Actuators for Turbulent Flows. Lennart Löfdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame
Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories
Microrobotics Thorbjörn Ebefors and Göran Stemme, Royal Institute of Technology, Sweden
Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc.
Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan
Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute
Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology
Flow Control, Mohamed Gad-el-Hak, University of Notre Dame)

Part IV: The Future
Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University
Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University
Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame
Index